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Enhanced sputtering and incorporation of Mn in implanted GaAs and ZnO nanowires
Institute for Solid State Physics, Friedrich-Schiller-University Jena, Jena, Germany.
Institute for Solid State Physics, Friedrich-Schiller-University Jena, Jena, Germany.
Halmstad University, School of Information Technology. Solid State Physics/The Nanometer Structure Consortium, Lund University, Lund, Sweden.
Halmstad University, School of Information Technology. Solid State Physics/The Nanometer Structure Consortium, Lund University, Lund, Sweden.
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2014 (English)In: Journal of Physics D: Applied Physics, ISSN 0022-3727, E-ISSN 1361-6463, Vol. 47, no 39, article id 394003Article in journal (Refereed) Published
Abstract [en]

We simulated and experimentally investigated the sputter yield of ZnO and GaAs nanowires, which were implanted with energetic Mn ions at room temperature. The resulting thinning of the nanowires and the dopant concentration with increasing Mn ion fluency were measured by accurate scanning electron microscopy (SEM) and nano-x-Ray Fluorescence (nanoXRF) quantification, respectively. We observed a clearly enhanced sputter yield for the irradiated nanowires compared to bulk, which is also corroborated by iradina simulations. These show a maximum if the ion range matches the nanowire diameter. As a consequence of the erosion thinning of the nanowire, the incorporation of the Mn dopants is also enhanced and increases non-linearly with increasing ion fluency. © 2014 IOP Publishing Ltd.

Place, publisher, year, edition, pages
Bristol: Institute of Physics Publishing (IOPP), 2014. Vol. 47, no 39, article id 394003
Keywords [en]
Ion implantation, nanowires, sputtering
National Category
Condensed Matter Physics
Identifiers
URN: urn:nbn:se:hh:diva-27512DOI: 10.1088/0022-3727/47/39/394003ISI: 000341772000005Scopus ID: 2-s2.0-84922124528OAI: oai:DiVA.org:hh-27512DiVA, id: diva2:781777
Funder
Swedish Research CouncilKnut and Alice Wallenberg Foundation
Note

The authors gratefully acknowledge funding by the German Research Society (DFG) within the DACH project. We thank the European Synchrotron Radiation Facility (ESRF) for the allocated beam-time.The authors acknowledge financial support from the Nanometer Structure Consortium at Lund University (nmC@LU), the Swedish Research Council (VR), and the Knut and Alice Wallenberg Foundation (KAW).

Available from: 2015-01-19 Created: 2015-01-19 Last updated: 2018-04-03Bibliographically approved

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Paschoal Jr, WaldomiroPettersson, Håkan

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