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Metal-assisted chemical etching of Si for fabrication of nanoimprint stamps
Anokhina, Ksenia
Avd. f. Fasta Tillståndets Fysik, Lunds Universitet, Lund, Sweden.
(Nanovetenskap)
Graczyk, Mariousz
Avd. f. Fasta Tillståndets Fysik, Lunds Universitet, Lund, Sweden.
(Nanometerkonsortiet)
Kvennefors, Anders
Avd. f. Fasta Tillståndets Fysik, Lunds Universitet, Lund, Sweden.
(Nanometerkonsortiet)
Montelius, Lars
Avd. f. Fasta Tillståndets Fysik, Lunds Universitet, Lund, Sweden.
(Nanometerkonsortiet)
Maximov, Ivan
Avd. f. Fasta Tillståndets Fysik, Lunds Universitet, Lund, Sweden.
(Nanometerkonsortiet)
Pettersson, Håkan
Halmstad University, School of Information Technology, Halmstad Embedded and Intelligent Systems Research (EIS), MPE-lab.
(Nanovetenskap)
ORCID iD:
0000-0001-5027-1456
Show others and affiliations
2011 (English)
Conference paper, Oral presentation with published abstract (Refereed)
Place, publisher, year, edition, pages
2011.
National Category
Condensed Matter Physics
Identifiers
URN:
urn:nbn:se:hh:diva-22410
OAI: oai:DiVA.org:hh-22410
DiVA, id:
diva2:625203
Conference
EIPBN - The 55th International Conference on Electron, Ion, Photon Beam Technology and Nanofabrication, May 31-June 3, Las Vegas, US
Available from:
2013-06-04
Created:
2013-06-04
Last updated:
2018-04-03
Bibliographically approved
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Pettersson, Håkan
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modern-language-association-8th-edition
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