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Metal-assisted chemical etching of Si for fabrication of nanoimprint stamps
Avd. f. Fasta Tillståndets Fysik, Lunds Universitet, Lund, Sweden. (Nanovetenskap)
Avd. f. Fasta Tillståndets Fysik, Lunds Universitet, Lund, Sweden. (Nanometerkonsortiet)
Avd. f. Fasta Tillståndets Fysik, Lunds Universitet, Lund, Sweden. (Nanometerkonsortiet)
Avd. f. Fasta Tillståndets Fysik, Lunds Universitet, Lund, Sweden. (Nanometerkonsortiet)
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2011 (English)Conference paper, Oral presentation with published abstract (Refereed)
Place, publisher, year, edition, pages
2011.
National Category
Condensed Matter Physics
Identifiers
URN: urn:nbn:se:hh:diva-22410OAI: oai:DiVA.org:hh-22410DiVA: diva2:625203
Conference
EIPBN - The 55th International Conference on Electron, Ion, Photon Beam Technology and Nanofabrication, May 31-June 3, Las Vegas, US
Available from: 2013-06-04 Created: 2013-06-04 Last updated: 2015-07-02Bibliographically approved

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