In this study, several surface topographies typical for dental implants were evaluated by different measurement techniques. The samples were prepared by machine turning, wet chemical etching and electrochemical polishing of titanium discs. The measurement techniques included an atomic force microscope (AFM), coherence scanning interferometer (CSI) and a 3D stereo scanning electron microscope (SEM). The aim was to demonstrate and discuss similarities and differences in the results provided by these techniques when analyzing submicron surface topographies. The estimated surface roughness parameters were not directly comparable since the techniques had different surface spatial wavelength band limits. However, the comparison was made possible by applying a 2D power spectral density (PSD) function. Furthermore, to simplify the comparison, all measurements were characterized using the ISO 25178 standard parameters. Additionally, a Fourier transform was applied to calculate the instrument transfer function in order to investigate the behavior of CSI at different wavelength ranges. The study showed that 3D stereo SEM results agreed well with AFM measurements for the studied surfaces. Analyzed surface parameter values were in general higher when measured by CSI in comparison to both AFM and 3D stereo SEM results. In addition, the PSD analysis showed a higher power spectrum density in the lower frequency range 10−2–10−1 µm−1 for the CSI compared with the other techniques. © 2018 IOP Publishing Ltd