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Integrated On-Chip Nano-Optomechanical Systems
Halmstad University, School of Information Technology, Halmstad Embedded and Intelligent Systems Research (EIS), MPE-lab.
National Institute for Nanotechnology, Alberta, Canada; Department of Biological Sciences & Department of Electrical and Computer Engineering, University of Alberta, Alberta, Canada.
National Institute for Nanotechnology, Alberta, Canada & Department of Physics, University of Alberta, Alberta, Canada.
2017 (English)In: International Journal of High Speed Electronics and Systems, ISSN 0129-1564, Vol. 26, no 1-2, 1740005Article in journal (Refereed) Published
Abstract [en]

Recent developments in integrated on-chip nano-optomechanical systems are reviewed. Silicon-based nano-optomechanical devices are fabricated by a two-step process, where the first step is a foundry-enabled photonic circuits patterning and the second step involves in-house mechanical device release. We show theoretically that the enhanced responsivity of near-field optical transduction of mechanical displacement in on-chip nano-optomechanical systems originates from the finesse of the optical cavity to which the mechanical device couples. An enhancement in responsivity of more than two orders of magnitude has been observed when compared side-by-side with free-space interferometry readout. We further demonstrate two approaches to facilitate large-scale device integration, namely, wavelength-division multiplexing and frequency-division multiplexing. They are capable of significantly simplifying the design complexity for addressing individual nano-optomechanical devices embedded in a large array. © 2017 World Scientific Publishing Company.

Place, publisher, year, edition, pages
Singapore: World Scientific Publishing Co. Pte Ltd , 2017. Vol. 26, no 1-2, 1740005
Keyword [en]
Nanomechanical resonators, Nano-optomechanical systems, Nanophotonics
National Category
Condensed Matter Physics
Identifiers
URN: urn:nbn:se:hh:diva-33032DOI: 10.1142/S0129156417400055Scopus ID: 2-s2.0-85013339684OAI: oai:DiVA.org:hh-33032DiVA: diva2:1064713
Available from: 2017-01-12 Created: 2017-01-12 Last updated: 2017-03-13Bibliographically approved

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CiteExportLink to record
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Citation style
  • apa
  • harvard1
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  • modern-language-association-8th-edition
  • vancouver
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  • de-DE
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  • Other locale
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