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2025 (English)In: Microelectronic Engineering, ISSN 0167-9317, E-ISSN 1873-5568, Vol. 300, article id 112363Article in journal (Refereed) Epub ahead of print
Abstract [en]
Circuits of multiple deterministically positioned semiconductor nanowires (NWs) is the basis of many devices for photonic, quantum, or conventional transistor applications. To explore and iterate on the design of larger circuits, the means to quickly place and electrically evaluate NWs at target locations must be developed. We propose and demonstrate a multi-NW circuit building concept on SiO2/Si substrates, which enables us to quickly position and orient NW components into pre-designed configurations. Micro-manipulator probes are used to guide the NWs into reactive ion etched trenches, with desired designs, before contact metallization. The positioning works over a wide combination of trench widths and depths. Positioning accuracies are contingent on EBL patterning, precise up to ±10 nm. To demonstrate the concept, we create circuits of InP and InAs NWs with a wide variety of specific orientations. The concept was used to iterate a procedure for creating optimal contacts for InP NW photodiodes. Subsequently, we could fabricate and electrically probe 54 fully operational nano-photodiodes placed on three different samples, from which considerable statistics of diode performance could be obtained. Fabrication steps are directly compatible with conventional Si CMOS architecture and should function for a wide range of NW types. The accuracy and rate of placement combined with high fabrication yields enables proof-of-concept prototyping of complex circuits. © 2025 The Authors
Place, publisher, year, edition, pages
Amsterdam: Elsevier, 2025
Keywords
III-V, Nanowires, Optoelectronics, Nanophotonics
National Category
Condensed Matter Physics Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
urn:nbn:se:hh:diva-56426 (URN)10.1016/j.mee.2025.112363 (DOI)001505987300001 ()2-s2.0-105007058041 (Scopus ID)
Funder
Swedish Research CouncilNovo Nordisk FoundationKnut and Alice Wallenberg FoundationOlle Engkvists stiftelseEU, Horizon Europe, 101046790
Note
This work was supported by the Swedish Research Council, NanoLund, the Office of Naval Research (Grant No. N62909–20-1-2038), Novo Nordisk Foundation project SolidQ, the Wallenberg Initiative Materials Science for Sustainability (WISE) funded by the Knut and Alice Wallenberg Foundation, the Olle Engkvist Foundation, and the European Union Horizon Europe project InsectNeuroNano (Grant 101046790).
2025-06-242025-06-242025-06-30Bibliographically approved